论文信息 - Atomic Layer Deposition of HfO2 Films Using TDMAH and Water or Ammonia Water - 字舞流文

Atomic Layer Deposition of HfO2 Films Using TDMAH and Water or Ammonia Water

E. Guziewicz | M. Godlewski | B. Witkowski | S. Gierałtowska | L. Wachnicki | P. Dłużewski | S. Gieraltowska