Application of femtosecond laser multi-focusing to parallel fabrication
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A parallel fabrication method of micro-optic devices by multi-focusing fs laser was presented.The influence of laser intensity and focusing depth on the experiments was studied.Multiple micro-waveguides were fabricated by the parallel method and the space between parallel micro-waveguides was controlled in 2~5 μm.The waveguides fabricated by parallel method were compared with that by single fusing method,the results show that both kinds of waveguides have the same shape,but the waveguides fabricated by parallel method are inferior to the latter in transmission performance.The multi-focusing was interpreted with the phenomena of self-focusing induced by ultra powerful laser,and the effects of laser intensity and focus depth on the multi-focusing were theoretically analyzed.Experimental results show that this method has advantage in flexible control and easy operation compared with other parallel methods.