论文信息 - Formation of dual-phase HfO2–HfxSi1−xO2 dielectric and its application in memory devices - 字舞流文

Formation of dual-phase HfO2–HfxSi1−xO2 dielectric and its application in memory devices

Y. Yeo | A. Chin | A. Du | W. Yoo | Y. Wang | Jinghao Chen