Modeling of in-plane distortions due to variations in absorber stress
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Roxann L. Engelstad | Karen A. Thole | William J. Dauksher | M. Laudon | K. D. Cummings | Philip A. Seese | W. A. Johnson | D. J. Resnick
[1] Roxann L. Engelstad,et al. Practical considerations in x‐ray mask mounting methodology , 1993 .