Quantitative Measuring System of a flexible Microrobot-based Microassembly Station

At the University of Karlsruhe, a flexible micromanipulation station based on high-precise piezo-driven microrobots has been developed. Providing a flexible tool in several application fields in the micro world the robots operate either on the stage of an automated light optical microscope or inside the vacuum chamber of a scanning electron microscope (SEM). In order to automate manipulating tasks like the assembly of a microsystem, an intelligent and precise sensor system is necessary to detect and measure micro objects and tools. This paper summarizes the approach of real-time measuring in two dimensions by the microscope images and presents the micro triangulation for obtaining depth information from the micro world.