Model development and control design for high-speed atomic force microscopy

This paper addresses the development of energy-based models and model-based control designs necessary to achieve present and projected applications involving atomic force microscopy. The models are based on a combination of energy analysis at the mesoscopic level with stochastic homogenization techniques to construct low-order macroscopic models. Approximate model inverses are then employed as filters to linearize transducer responses for linear robust control design.

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