Thermal resistance assessment in multi-trenched power devices

Abstract For the first time the thermal resistance ( R th ) of Multi-Trenched (MT) power devices is evaluated and compared with their Deep Trench Isolation flanked (DTI-flanked) and bulk counterparts. The R th extraction is carried out by adapted test structures based on the four-point heater/sensor method. Additional TCAD simulation supports the experimental stationary values and proves that dynamic heating can limit the MT power devices energy capability.

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