Laser Micro-Structuring of Fused Silica Subsequent to Plasma-Induced Silicon Suboxide Generation and Hydrogen Implantation

Abstract A low-temperature atmospheric pressure plasma jet was used for chemical reduction of fused silica. For this purpose, a hydrogen-containing plasma was applied. A silicon suboxide layer was generated and hydrogen was implanted into the bulk material. Changes in stoichiometry, concentration of hydrogen and optical transmission were determined. An ArF excimer laser was used for the ablation of untreated and plasma-treated fused silica. The ablation threshold was significantly decreased by a factor of 4.6 in case of plasma treated substrates. Furthermore, in multi-pulse experiments, the ablation rate remained constant at least up to a depth of 10.5 μm.

[1]  Christoph Gerhard,et al.  Hybrid Laser-Plasma Micro-Structuring of Fused Silica Based on Surface Reduction by a Low-Temperature Atmospheric Pressure Plasma , 2012 .

[2]  T. W. Hickmott.  Interaction of Atomic Hydrogen with Glass , 1960 .

[3]  Reinhold Ebner,et al.  Pulsed laser deposition: a new technique for deposition of amorphous SiOx thin films , 2003 .

[4]  B. Blumenthal,et al.  Glass surface treatment with excimer and CO2 lasers , 1990 .

[5]  Jun Wang,et al.  One-step microfabrication of fused silica by laser ablation of an organic solution , 1999 .

[6]  J. A. Pask,et al.  REACTION OF FUSED SILICA WITH HYDROGEN GAS , 1982 .

[7]  Fabrication of Multiple Slanted Microstructures on Silica Glass by Laser-Induced Backside Wet Etching , 2010 .

[8]  J. Ihlemann,et al.  Excimer laser ablation of fused silica , 1992 .

[9]  J. Ihlemann.  Micro patterning of fused silica by laser ablation mediated by solid coating absorption , 2008 .

[10]  J Zhang,et al.  Direct fabrication of microgratings in fused quartz by laser-induced plasma-assisted ablation with a KrF excimer laser. , 1998, Optics letters.

[11]  Jürgen Ihlemann,et al.  Laser patterning of SiOx-layers for the fabrication of UV diffractive phase elements , 2005 .

[12]  D. Ryan,et al.  Hydrogen-induced change in magnetic structure of the metallic glass Fe89Zr11 , 1983 .

[13]  Patrick Georges,et al.  Efficient versatile-repetition-rate picosecond source for material processing applications. , 2008, Applied optics.

[14]  Christoph Gerhard,et al.  Near-surface modification of optical properties of fused silica by low-temperature hydrogenous atmospheric pressure plasma. , 2012, Optics letters.