Application of AZ4903 to the production of micromotor's stator windings

Electromagnetic planar micromotors were produced using AZ4903 with high depth-width ratios and thicknesses of the planar micromotor's stator windings. The production method can optimize the coating thickness as a function of the relational speed and the prebaking time as a function of the operating temperature. The optimal lithography and developing times are also given. A winding thickness of 40 μm gives the ideal perpendicularity. Tests of the rotational speeds and pull-out torque of the micromotors show that the micromotor works at steady speeds with little ripple of the pull-out torque.