Radio frequency nanowire resonators and in situ frequency tuning

We report the fabrication and characterization of radio frequency nanoelectromechanical resonators based on semiconductor nanowires with a dual-gate configuration. Suspended nanowire resonators were fabricated with little residual tension using a dry transfer method and lithographically defined metal electrodes. Fundamental flexural modes of the nanowire resonators were actuated and detected electrically at room temperature using the on-chip gates and a mixing circuit. The dual-gate setup in turn enabled us to tune the nanowire resonant frequency up or down in situ through elastic hardening and capacitive softening effects, respectively. Selective actuation of the out-of-plane or the in-plane vibrational mode was also reported.