Large-area infrared microemitter arrays for dynamic scene projection

Resistive emitter arrays are formed via the fabrication of microemitters on Si CMOS electronics. These IR emitter arrays using microstructures have been developed at Honeywell to project scenes for a wide range of applications. A new array which has been fabricated has a size of 544 X 672 pixels. Other arrays producing very high apparent temperatures in excess of 700 K have also been fabricated. Arrays have been fabricated for projecting low background scenes achieved through cryogenic operation. All arrays are designed to project IR radiation over the full MWIR and LWIR spectral bands. Individual arrays and their emission properties will be described. Array properties at different substrate temperatures will be described. Advances in packaging of these different array types will also be discussed.