论文信息 - Evidence for negatively charged vacancy defects in 6H-SiC after low-energy proton implantation - 字舞流文

Evidence for negatively charged vacancy defects in 6H-SiC after low-energy proton implantation

M. Barthe | C. Corbel | D. Britton | A. Hempel | G. Kögel | P. Sperr | W. Triftshäuser | P. Desgardin | L. Henry | W. Bauer-Kugelmann