Development of advanced multi-tone mask by using two different transmittance modulation materials

Multi-tone mask (MTM) consists of more than two layers having different transmittance modulation layers. A novel method is proposed to manufacture a MTM based on two kinds of transmittance modulation materials such as chromium and molybdenum. Different modulation materials cannot be only act as etch-stopper to each other, but also they play a role as a separator between the layers consisted of MTM. Furthermore, clearly classified modulation layers contribute to define one of the targeted transmittance according to different etching process. Especially, a conventional MTM requires three mask writing processes to form three patterns whereas the proposed MTM structure makes it possible to form three patterns by using only two mask writing processes. It is found that the turnaround time of proposed MTM is remarkably decreased as value of 30% compared to that of conventional MTM. MoSi-/Cr-based tri-tone mask configuration having 37, 15, and 0% of transmittance had been demonstrated based on the optimized thin-film conditions. Optical uniformity characteristics were also carried out to evaluate the photomask performance. Consequently, the proposed MTM is not only expected to extend the variation of objective transmittance, but also it is a very promise method for achieving a high performance photo-mask by reducing its fabrication cost.