Considerations on highly scalable and easily stackable phase change memory cell array for low-cost and high-performance applications

Needs for the performance improvement of memory subsystem in big data and clouding computing era begin to open new markets for emerging memories such as phase change memory, spin-torque-transfer magnetic memory, and metal oxide memory. To fulfill these needs, a cost-effective and high-speed phase change memory cell scheme was introduced at 19nm technology node, which is directly scalable down to 1y or 1z nm nodes and can be extendable to stacked array for higher density. Here, key technologies such as self-aligned cell patterning and vertical poly-Si diode switch on metal word line were adopted. In addition, damascene Ge-Sb-Te technologies were optimized to improve programming speed and to show excellent cell performances.