Dynamic response of tactile sensor applying cantilever in elastomer

We report on the dynamic characteristics of a tactile sensor using a micro standing cantilever embedded in a silicone elastomer. Vibration test results show that the dynamic characteristics of the sensor, which is composed of a cantilever and a surrounding elastomer, depend on those of the elastomer part. Moreover, no matter how much the resonant frequency of the cantilever is, it can follow the oscillating deformation of the elastomer as long as the oscillation frequency is below the resonant frequency of the combined sensor structure.