Error analysis for a diffraction grating interferometric stylus probing system

A prototype of a stylus probe with an interferometric transducer for surface profiling and roughness measurement was recently developed for surface texture, form error, radius, inclination and dimension measurement. A reflective cylindrical holographic diffraction grating fabricated into cylindrical shape, referred to as the `length master', acts as the moving part governing the path length of light. The surface profile information was transformed into electrical signals using a laser diode grating interferometer to measure the rotational motion of the measuring lever. To precisely define the performance capability of the system, error analysis was performed in order to assess the potential measuring error due to imperfections in manufacturing and assembly of the system's mechanical components. The uncertainty relating to the construction of the device, geometrical features, operating environment and optical characteristics is also presented.

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