Performance test of gas by-pass type thermal error controller

In accordance with the trend for high-speed and multi-axes of machine tools, thermal deformation has become an important factor in the accuracy of machine tools. It was analyzed that thermal deformation error accounts for about 70% of all errors made with machine tools. For precise temperature control, both cooling and heating should be done. A hot gas by-pass type of cooling method has a simplified structure and temperature control accuracy to with in plusmn0.1 degC. In this study, the operational characteristics of the thermal error controller, including temperature controllability according to hot gas flow and preset temperature sustainability according to heat load, were tested. It is expected that this study will contribute to the development and performance assessment of thermal error controllers, which could minimize thermal errors and improve the quality of semiconductor equipment, precision injection molds, and precision machine tools.