论文信息 - The on-chip detection of micromotor rotational speed

The on-chip detection of micromotor rotational speed

The design, fabrication and performance of photodiodes for the on-chip detection of micromotor rotation are described. The micromotor contains 12 stator poles and four rotor poles. Beneath the motor four photodiodes are buried on a silicon surface with the same symmetry as the four rotor poles. The on-chip detection of motor rotation has been realized by the photovoltaic effect of the photodiodes. The measurement characteristics of the micromotor rotation have also been investigated.

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