Thin film growth by the pulsed laser assisted deposition technique

Abstract Pulsed laser-assisted deposition (PLD) has recently emerged as a most promising film growth technique, at least for basic research, as this has been best demonstrated for highTc superconducting oxides and YBa2Cu3O7−x in particular. This article briefly outlines the specific features of this technique and its potential, illustrated by the example of the growth of YBa2Cu3O7−x thin films aimed at the preparation of microwave passive devices. The perspectives of development of PLD and its ability to become an industrial process are discussed.

[1]  P. T. Murray,et al.  Growth of TiC thin films by pulsed laser evaporation , 1991 .

[2]  S. Kawai,et al.  Epitaxial growth and surface acoustic wave properties of lithium niobate films grown by pulsed laser deposition , 1995 .

[3]  D. N. Mashburn,et al.  Characterization of ground‐state neutral and ion transport during laser ablation of Y1Ba2Cu3O7−x using transient optical absorption spectroscopy , 1989 .

[4]  M. Sentis,et al.  Time-resolved measurements of plume shielding during ArF laser ablation of silicon , 1994 .

[5]  I. Boyd,et al.  Synthesis of (BiPb)2Sr2Ca2Cu3O10 superconducting thin films on MgO using a multilayered pulsed laser deposition method , 1993 .

[6]  Structural characterization of CoCu multilayers grown by laser ablation deposition , 1993 .

[7]  H. Stiegler,et al.  Excimer laser photoablation of silicon , 1986 .

[8]  Ho Jin Cho,et al.  Structural and electro‐optic properties of pulsed laser deposited Bi4Ti3O12 thin films on MgO , 1993 .

[9]  A. Mele,et al.  Spatial distribution of laser-ablated material by probing a plasma plume in three dimensions , 1996 .

[10]  N. S. Nogar,et al.  Ablation of high‐temperature superconductor studied by resonance ionization mass spectrometry (RIMS) , 1991 .

[11]  A. Morimoto,et al.  Reduction of Droplet Formation by Reducing Target Etching Rate in Pulsed Laser Ablation , 1994 .

[12]  K. Müller,et al.  Possible highTc superconductivity in the Ba−La−Cu−O system , 1986 .

[13]  S. Miyashita,et al.  Structure and Superconducting Properties of HgBa2CaCu2Oy Films Prepared by Laser Ablation , 1994 .

[14]  E. Logothetis,et al.  Pulsed laser deposition of SiC films on fused silica and sapphire substrates , 1993 .

[15]  M. Jiang,et al.  Epitaxial growth of RbTiOPO4 films on KTiOPO4 substrates by excimer laser ablation technique , 1994 .

[16]  R. Eason,et al.  Epitaxial growth of Bi12GeO20 thin‐film optical waveguides using excimer laser ablation , 1991 .

[17]  Tieer Gu,et al.  Pulsed laser deposition of diamond‐like carbon films , 1992 .

[18]  R. Lucchese,et al.  Monte-carlo simulations of gas-phase collisions in rapid desorption of molecules from surfaces , 1987 .

[19]  S. W. Goodyear,et al.  Effect of small changes in composition on the electrical and structural properties of YBa2Cu3O7 thin films , 1990 .

[20]  G. E. Giles,et al.  Macroscopic theory of pulsed-laser annealing. I. Thermal transport and melting , 1981 .

[21]  M. Späth,et al.  Time resolved dynamics of subpicosecond laser ablation. , 1993 .

[22]  Y. S. Cho,et al.  Structural and electro‐optic properties of laser ablated Bi4Ti3O12 thin films on SrTiO3(100) and SrTiO3(110) , 1992 .

[23]  J. Mazumder,et al.  One‐dimensional steady‐state model for damage by vaporization and liquid expulsion due to laser‐material interaction , 1987 .

[24]  John D. Budai,et al.  Effect of oxygen pressure on the synthesis of YBa2Cu3O7-x thin films by post-deposition annealing , 1991 .

[25]  R. Ramesh,et al.  Growth and characterization of (Y3Fe5O12–Bi3Fe5O12) heterostructures by pulsed laser deposition , 1995 .

[26]  C. Doughty,et al.  Steady state pulsed laser deposition target scanning for improved plume stability and reduced particle density , 1995 .

[27]  Aly E. Fathy,et al.  High temperature superconducting components for microwave systems , 1993 .

[28]  Peter Russer,et al.  High Q coplanar transmission line resonator of YBa2Cu3O7−x on MgO , 1989 .

[29]  Xindi Wu,et al.  Target modification in the excimer laser deposition of YBa2Cu3O7−x thin films , 1991 .

[30]  J. Dieleman,et al.  Reduction of droplet emission and target roughening in laser ablation and deposition of metals , 1993 .

[31]  Ian W. Boyd,et al.  Characteristics of high quality ZnO thin films deposited by pulsed laser deposition , 1994 .

[32]  N. Cherief,et al.  Laser ablation deposition and magnetic characterization of metallic thin films based on rare earth and transition metals , 1993 .

[33]  T. George,et al.  Internal explosion in laser ablation of superconducting targets. Interim technical report , 1992 .

[34]  Z. Ren,et al.  Superconducting epitaxial (Tl,Bi)Sr1.6Ba0.4Ca2Cu3O9−δ film with high critical current in magnetic field , 1994 .

[35]  T. Morishita,et al.  Time‐of‐flight mass spectroscopic studies on the laser ablation process , 1993 .

[36]  J. Perrière,et al.  Laser Assisted Deposition of Thin BiSrCaCuO Films , 1990 .

[37]  Jean-Pierre Locquet,et al.  Block‐by‐block deposition: A new growth method for complex oxide thin films , 1994 .

[38]  Robert W. Eason,et al.  Pulsed laser deposition of Ga‐La‐S chalcogenide glass thin film optical waveguides , 1993 .

[39]  Ahmad Safari,et al.  Preparation of thin‐film (Ba0.5,Sr0.5)TiO3 by the laser ablation technique and electrical properties , 1994 .

[40]  Lee,et al.  Desorption studies of metal atoms using laser-induced surface-plasmon excitation. , 1993, Physical review. B, Condensed matter.

[41]  Andre A. Gorbunov,et al.  Ultrathin film deposition by pulsed laser ablation using crossed beams , 1996 .

[42]  R. F. Haglund,et al.  Laser Ablation Mechanisms and Applications , 1991 .

[43]  U C Paek,et al.  Observation of Laser-induced Explosion of Solid Materials and Correlation with Theory. , 1974, Applied optics.

[44]  B. Wilkens,et al.  a-axis oriented epitaxial YBa2Cu3O(7-x)-PrBa2Cu3O(7-y) heterostructures , 1990 .

[45]  Eom,et al.  Resistive loss at 10 GHz in c-axis-aligned in-situ-grown YBa2Cu3O7 films. , 1991, Physical review. B, Condensed matter.

[46]  T. Venkatesan,et al.  Observation of two distinct components during pulsed laser deposition of high Tc superconducting films , 1988 .

[47]  Costas P. Grigoropoulos,et al.  Near‐threshold laser sputtering of gold , 1995 .

[48]  S. C. Langford,et al.  Interactions of wide band-gap single crystals with 248 nm excimer laser radiation. II: NaCl , 1993 .

[49]  Otis,et al.  Laser ablation of YBa2Cu3O7- delta as probed by laser-induced fluorescence spectroscopy. , 1991, Physical review letters.

[50]  A. Kingon,et al.  Synthesis and characterization of Pb (ZrxTi1−x)O3 thin films produced by an automated laser ablation deposition technique , 1993 .

[51]  P. Sakthivel,et al.  Dual‐laser ablation for particulate‐free film growth , 1995 .

[52]  Landman,et al.  Superheating, melting, and annealing of copper surfaces. , 1993, Physical review letters.

[53]  Howard M. Smith,et al.  Vacuum Deposited Thin Films Using a Ruby Laser , 1965 .

[54]  H. Funakoshi,et al.  Fabrication of Lead Titanate Thin Film by Laser Ablation with Alternate Deposition of Lead Oxide and Titanium Oxide Precursors , 1994 .

[55]  Daniel D. Stancil,et al.  Bismuth substituted iron garnet thin films deposited on silicon by laser ablation , 1995 .

[56]  S. Kawai,et al.  Superconducting superlattices: Verification of two‐dimensional nature in high Tc Bi2Sr2(Ca1−xYx)Cu2O8 superconductors , 1990 .

[57]  D. Ravelosona,et al.  Growth of [YBa2Cu3O7-δ]M/[PrBa2Cu3-xGaxO7-δ]N Superlattices by Pulsed Laser Deposition , 1993 .

[58]  Emission studies of the plume produced during YBa2Cu3O7 film production by laser ablation , 1994 .

[59]  Xiaomin Li,et al.  Superconductivity in Artificially Layered Ba–Ca–Cu–O Thin Films , 1994 .

[60]  C. H. Chen,et al.  Laser desorption mass spectra of YBa2Cu3O7−x , 1990 .

[61]  J. Bravman,et al.  Laser ablation for materials synthesis , 1990 .

[62]  J. Claassen,et al.  Pulsed laser deposition of high‐quality NbN thin films , 1994 .

[63]  Takeshi Kobayashi,et al.  Improved Surface Smoothness of YBa2Cu3Oy Films and Related Multilayers by ArF Excimer Laser Deposition with Shadow Mask “Eclipse Method” , 1994 .

[64]  Jagdish Narayan,et al.  Theoretical model for deposition of superconducting thin films using pulsed laser evaporation technique , 1990 .

[65]  James S. Speck,et al.  Pulsed laser deposition of oriented In2O3 on (001) InAs, MgO, and yttria‐stabilized zirconia , 1993 .

[66]  J. Ketterson,et al.  Pulsed excimer laser deposition of potassium titanyl phosphate films , 1994 .

[67]  T. Okada,et al.  Plume‐substrate interaction in pulsed‐laser deposition of high‐temperature superconducting thin films , 1994 .

[68]  D. Clarke,et al.  Crystallographic orientation of epitaxial BaTiO3 films: The role of thermal‐expansion mismatch with the substrate , 1995 .

[69]  E. Wiener-avnear.  Artificially engineered pyroelectric Sr1−xBaxTiO3 superstructure films , 1994 .

[70]  H. Tabata,et al.  Phase Control of Superconducting Bi-Sr-Ca-Cu-O Thin Films Prepared by Laser Ablation Method , 1991 .

[71]  Mineo Kobayashi,et al.  High Tc superconductor microwave resonators and filters , 1993 .

[72]  Chu,et al.  Superconductivity at 93 K in a new mixed-phase Yb-Ba-Cu-O compound system at ambient pressure. , 1987, Physical review letters.

[73]  Yong Ki Park,et al.  Deposition angle‐dependent morphology of laser deposited YBa2Cu3O7 thin films , 1994 .

[74]  Martin Schell,et al.  Low jitter single‐mode pulse generation by a self‐seeded, gain‐switched Fabry–Pérot semiconductor laser , 1994 .

[75]  Hoi Sing Kwok,et al.  Pulsed laser deposition of VO2 thin films , 1994 .

[76]  J. Kools,et al.  Laser ablation deposition of TiN films , 1992 .

[77]  J. Narayan,et al.  Low‐temperature processing of titanium nitride films by laser physical vapor deposition , 1989 .

[78]  S. Shah,et al.  Deposition of polytetrafluoroethylene films by laser ablation , 1993 .

[79]  M. Martynyuk.  Phase explosion of a metastable fluid , 1977 .

[80]  Bernhard Roas,et al.  Off-axis laser deposition of YBa2Cu3O7-δ thin films , 1992 .

[81]  R. Fleming,et al.  Very large magnetoresistance in perovskite‐like La‐Ca‐Mn‐O thin films , 1994 .

[82]  R. Singh,et al.  Pulsed laser deposition of high quality LiNbO3 films on sapphire substrates , 1998 .

[83]  John A. Agostinelli,et al.  Epitaxial LiTaO3 thin films by pulsed laser deposition , 1993 .

[84]  D. K. Ottesen,et al.  Ion-assisted pulsed laser deposition of cubic boron nitride films , 1994 .

[85]  I. Ursu,et al.  Deposition of high quality TiN films by excimer laser ablation in reactive gas , 1993 .

[86]  D. Lowndes,et al.  Pulsed-laser ablation growth of epitaxial ZnSe1-xSx films and superlattices with continuously variable composition , 1993 .

[87]  H. Newman,et al.  Microwave devices using YBa/sub 2/Cu/sub 3/O/sub 7- delta / films made by pulsed laser deposition , 1991 .

[88]  H. Kwok,et al.  TIME-RESOLVED RESONANT ABSORPTION STUDY OF 532-NM LASER-GENERATED PLUMES OVER YBA2CU3O7 TARGETS , 1991 .

[89]  D. A. Kramer,et al.  Thin films of semiconductors and dielectrics produced by laser evaporation , 1970 .

[90]  J. P. Stoquert,et al.  Low‐temperature synthesis of silicon oxide, oxynitride, and nitride films by pulsed excimer laser ablation , 1994 .

[91]  J. Narayan,et al.  A novel method for simulating laser-solid interactions in semiconductors and layered structures , 1989 .

[92]  A. Catherinot,et al.  Time-resolved spectroscopic study of the KrF laser-induced plasma plume created above an YBaCuO superconducting target , 1989 .

[93]  Zhu,et al.  Scanning tunneling microscopy of pulsed-laser-deposited YBa2Cu3O7- delta epitaxial thin films: Surface microstructure and growth mechanism. , 1991, Physical review. B, Condensed matter.

[94]  Hoi Sing Kwok,et al.  Low Resistivity Indium Tin Oxide Films by Pulsed Laser Deposition , 1993 .