Microfabrication of chamber-type microchips and its applications for chemical sensors

Abstract A micromachined 3×6 mm chip with a 3D silicon chamber (1.2×1.2 mm 2 and 300 μm thick)was developed for the construction of micro-size chemical sensors and biosensors. Anisotropic etching was used for the formation of the chamber on the p -type silicon wafer (100) and then was anodic bonded to the Pyrex glass down-substrate with pre-deposited platinum electrode. The electrochemical characterization of its Pt electrode and Ag/AgCl reference electrode is reported. It could be used as the substrate electrode for the sensing part of designed chemical sensors and biosensors with a protective and controlled environment. The preliminary application in the detection of H 2 O 2 , potassium ion and glucose is also reported. A cyclodextrin-ferrocene inclusion complex was prepared and used as the charge transfer mediator for glucose oxidase with promising results.