A high-temperature piezoelectric linear actuator operating in two orthogonal first bending modes

Conventionally, piezoelectric ultrasonic linear actuators operate in longitudinal and bending combination (degenerate) modes for producing an elliptic motion which drives a slider moving linearly. With the increasing temperature, the degenerate mode will split into two separated modes again, resulting in piezoelectric actuators working to fail. Here, we report a miniature piezoelectric ultrasonic linear actuator made of Mn modified (1−x)BiScO3–xPbTiO3 piezoelectric ceramics operating in two orthogonal first bending modes (B1-B1). The B1-B1 mode linear actuator showed much better load and speed temperature stability than piezoelectric actuators operating in different combination mode in the investigated temperature range of room temperature to 200 °C.

[1]  T. Okamoto,et al.  An ultrasonic motor using bending vibrations of a short cylinder , 1989, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[2]  Thomas R. Shrout,et al.  Manganese-modified BiScO3–PbTiO3 piezoelectric ceramic for high-temperature shear mode sensor , 2005 .

[3]  James Friend,et al.  Piezoelectric ultrasonic micro/milli-scale actuators , 2009 .

[4]  Bo Liu,et al.  Exact solutions for the free in-plane vibrations of rectangular plates , 2009 .

[5]  C. Randall,et al.  Elastic, piezoelectric, and dielectric characterization of modified BiScO/sub 3/-PbTiO/sub 3/ ceramics , 2005, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[6]  S. Ueha,et al.  Excitation conditions of flexural traveling waves for a reversible ultrasonic linear motor , 1985 .

[7]  Manabu Aoyagi,et al.  Single Phase Drive Ultrasonic Motor Using LiNbO3 Rectangular Vibrator , 2008 .

[8]  A. Ding,et al.  Characterization of the high-power piezoelectric properties of PMnN–PZT ceramics using constant voltage and pulse drive methods , 2005 .

[9]  Takeshi Morita,et al.  Miniature piezoelectric motors , 2003 .

[10]  S. Dong,et al.  High-power piezoelectric characteristics of manganese-modified BiScO3–PbTiO3 high-temperature piezoelectric ceramics , 2012 .

[11]  Kenji Uchino,et al.  Piezoelectric actuators 2006 , 2008 .

[12]  S. Dong,et al.  A shear-bending mode high temperature piezoelectric actuator , 2012 .

[13]  S He,et al.  Standing wave bi-directional linearly moving ultrasonic motor. , 1998, IEEE transactions on ultrasonics, ferroelectrics, and frequency control.

[14]  Kenji Uchino.  Piezoelectric ultrasonic motors: overview , 1998 .

[15]  Minoru Kurosawa,et al.  High speed ultrasonic linear motor with high transmission efficiency , 1989 .

[16]  T. Hemsel,et al.  Survey of the present state of the art of piezoelectric linear motors , 2000, Ultrasonics.

[17]  James Friend,et al.  Piezoelectric ultrasonic bidirectional linear actuator for micropositioning fulfilling Feynman's criteria , 2008 .

[18]  Sadayuki Ueha,et al.  Rotary Ultrasonic Motor using Extensional Vibration of a Ring , 1986 .

[19]  A. Sehirlioglu,et al.  High temperature properties of BiScO3–PbTiO3 piezoelectric ceramics , 2009 .

[20]  Shuxiang Dong,et al.  A high-temperature double-mode piezoelectric ultrasonic linear motor , 2012 .

[21]  S. Dong,et al.  Temperature dependence of dielectric, piezoelectric and elastic properties of BiScO3–PbTiO3 high temperature ceramics with morphotropic phase boundary (MPB) composition , 2012 .