A survey of sputtering-yield data for plasma-wall interaction calculations

Abstract An extensive survey of the literature has been conducted with the aim of presenting experimental sputtering-yield data for elemental target materials in a standardized way. The result of the survey encompasses some 7000 data points and will, together with a review of the data, be published as part of a forthcoming monograph. This collection contains numerous data for controlled-fusion devices. Some of these data sets will be discussed here and compared to the results of current theory and semiempirical yield predictions. As a conclusion, broad guidelines for designers of plasma devices as to which sputtering-yield data should be used for specific applications will be indicated.