Cavity-Waveguide Coupling Engineered High Sensitivity Silicon Photonic Crystal Microcavity Biosensors With High Yield

We present a high yield and high sensitivity on-chip biosensing system by combining subwavelength grating coupling and high sensitivity photonic crystal microcavity side coupled to a photonic crystal waveguide. 80% yield of working devices was experimentally demonstrated for sensitivity engineered L13 photonic crystal microcavities and 70% for L21 photonic crystal microcavities. Subwavelength grating couplers significantly improved the quality of the output transmission spectrum. By engineering the optical loss rate from the cavity to the waveguide, we experimentally detected 1 pM (67 pg/ml) and 50 femto-molar (3.35 pg/ml) concentration of avidin binding to biotin in phosphate buffered saline for L21 and L55 PC microcavities respectively, which represents the highest sensitivity versus other chip-based optical biosensors.

[1]  Ray T. Chen,et al.  Complementary metal–oxide–semiconductor compatible high efficiency subwavelength grating couplers for silicon integrated photonics , 2012 .

[2]  D. Erickson,et al.  Nanoscale optofluidic sensor arrays. , 2008, Optics express.

[3]  K. P. Yap,et al.  Mode transformer for miniaturized optical circuits. , 2005, Optics letters.

[4]  Ray T. Chen,et al.  Slow light engineering for high Q high sensitivity photonic crystal microcavity biosensors in silicon. , 2012, Biosensors & bioelectronics.

[5]  Siegfried Janz,et al.  Waveguide grating coupler with subwavelength microstructures. , 2009, Optics letters.

[6]  L. Frandsen,et al.  Photonic crystal nanostructures for optical biosensing applications. , 2009, Biosensors & bioelectronics.

[7]  Carlos Angulo Barrios,et al.  Optical Slot-Waveguide Based Biochemical Sensors , 2009, Sensors.

[8]  Suning Tang,et al.  Unidirectional surface-normal waveguide grating couplers for wafer-scale MCM interconnect , 1997, Photonics West.

[9]  P. Yeh,et al.  Electromagnetic propagation in periodic stratified media. I. General theory , 1977 .

[10]  K. Gylfason,et al.  An apodized SOI waveguide-to-fiber surface grating coupler for single lithography silicon photonics. , 2011, Optics express.

[11]  R. Baets,et al.  Silicon-on-insulator microring resonator for biosensing , 2007 .

[12]  Minhao Pu,et al.  High-efficiency, large-bandwidth silicon-on-insulator grating coupler based on a fully-etched photonic crystal structure , 2010 .

[13]  A. Di Falco,et al.  Slotted photonic crystal cavities with integrated microfluidics for biosensing applications. , 2011, Biosensors & bioelectronics.

[14]  T. Tsuchizawa,et al.  Low loss mode size converter from 0.3 /spl mu/m square Si wire waveguides to singlemode fibres , 2002 .

[15]  A Densmore,et al.  Silicon photonic wire biosensor array for multiplexed real-time and label-free molecular detection. , 2009, Optics letters.

[16]  Mehmet Fatih Yanik,et al.  Large-scale plasmonic microarrays for label-free high-throughput screening. , 2011, Lab on a chip.

[17]  Ray T. Chen,et al.  Efficient light coupling into in-plane semiconductor nanomembrane photonic devices utilizing a sub-wavelength grating coupler. , 2012, Optics express.

[18]  Y. Vlasov,et al.  Ultra-low loss photonic integrated circuit with membrane-type photonic crystal waveguides. , 2003, Optics express.

[19]  Shota Kita,et al.  Selective detection of sub-atto-molar Streptavidin in 10(13)-fold impure sample using photonic crystal nanolaser sensors. , 2013, Optics express.

[20]  G. Stemme,et al.  A packaged optical slot-waveguide ring resonator sensor array for multiplex label-free assays in labs-on-chips. , 2010, Lab on a chip.

[21]  Lech Wosinski,et al.  Highly efficient nonuniform grating coupler for silicon-on-insulator nanophotonic circuits. , 2010, Optics letters.

[22]  Muzammil Iqbal,et al.  Label-Free Biosensor Arrays Based on Silicon Ring Resonators and High-Speed Optical Scanning Instrumentation , 2010, IEEE Journal of Selected Topics in Quantum Electronics.

[23]  Siegfried Janz,et al.  Continuously apodized fiber-to-chip surface grating coupler with refractive index engineered subwavelength structure. , 2010, Optics letters.

[24]  Thomas F. Krauss,et al.  Dispersion engineered slow light in photonic crystals: a comparison , 2010 .

[25]  P. Fauchet,et al.  Two-dimensional silicon photonic crystal based biosensing platform for protein detection. , 2007, Optics express.

[26]  Sanja Zlatanovic,et al.  Photonic crystal microcavity sensor for ultracompact monitoring of reaction kinetics and protein concentration , 2009 .

[27]  R. Baets,et al.  High efficiency diffractive grating couplers for interfacing a single mode optical fiber with a nanophotonic silicon-on-insulator waveguide circuit , 2008 .

[28]  T. Krauss,et al.  Compact and Highly Efficient Grating Couplers Between Optical Fiber and Nanophotonic Waveguides , 2007, Journal of Lightwave Technology.

[29]  M. Lipson,et al.  Nanotaper for compact mode conversion. , 2003, Optics letters.

[30]  Ray T. Chen,et al.  Silicon nano-membrane based photonic crystal microcavities for high sensitivity bio-sensing. , 2012, Optics letters.

[31]  Solomon Assefa,et al.  Photonic crystal slab sensor with enhanced surface area. , 2010, Optics express.

[32]  H. Tsang,et al.  Nanoholes Grating Couplers for Coupling Between Silicon-on-Insulator Waveguides and Optical Fibers , 2009, IEEE Photonics Journal.

[33]  David Galas,et al.  Surface plasmon resonance biosensor for rapid label-free detection of microribonucleic acid at subfemtomole level. , 2010, Analytical chemistry.

[34]  Ray T. Chen,et al.  Wideband group velocity independent coupling into slow light silicon photonic crystal waveguide , 2010 .

[35]  R. Baets,et al.  Silicon-on-Insulator microring resonator for sensitive and label-free biosensing. , 2007, Optics express.

[36]  R. Baets,et al.  Grating Couplers for Coupling between Optical Fibers and Nanophotonic Waveguides , 2006 .

[37]  Hongjie Dai,et al.  Protein microarrays with carbon nanotubes as multicolor Raman labels , 2008, Nature Biotechnology.

[38]  Xudong Fan,et al.  Characterization of sensing capability of optofluidic ring resonator biosensors , 2010 .

[39]  T. Asano,et al.  Ultra-high-Q photonic double-heterostructure nanocavity , 2005 .

[40]  Ray T. Chen,et al.  Methods to array photonic crystal microcavities for high throughput high sensitivity biosensing on a silicon-chip based platform , 2014, Photonics West - Optoelectronic Materials and Devices.

[41]  Ray T. Chen,et al.  Slow light enhanced sensitivity of resonance modes in photonic crystal biosensors. , 2013, Applied physics letters.

[42]  S. M. Rytov,et al.  Electromagnetic Properties of a Finely Stratified Medium , 2014 .