Absolute positioning by multi-wavelength interferometry referenced to the frequency comb of a femtosecond laser.

A multi-wavelength interferometer utilizing the frequency comb of a femtosecond laser as the wavelength ruler is tested for its capability of ultra-precision positioning for machine axis control. The interferometer uses four different wavelengths phase-locked to the frequency comb and then determines the absolute position through a multi-channel scheme of detecting interference phases in parallel so as to enable fast, precise and stable measurements continuously over a few meters of axis-travel. Test results show that the proposed interferometer proves itself as a potential candidate of absolute-type position transducer needed for next-generation ultra-precision machine axis control, demonstrating linear errors of less than 61.9 nm in peak-to-valley over a 1-meter travel with an update rate of 100 Hz when compared to an incremental-type He-Ne laser interferometer.

[1]  H P Urbach,et al.  Long Distance Measurement with Femtosecond Pulses Using a Dispersive Interferometer References and Links , 2022 .

[2]  Andrew J. Fleming,et al.  A review of nanometer resolution position sensors: Operation and performance , 2013 .

[3]  Dong Wei,et al.  Time-of-flight method using multiple pulse train interference as a time recorder. , 2011, Optics express.

[4]  Nathan R. Newbury,et al.  Searching for applications with a fine-tooth comb , 2011 .

[5]  Young-Jin Kim,et al.  Absolute distance measurement by dual-comb interferometry with adjustable synthetic wavelength , 2013 .

[6]  P. Ciddor.  Refractive index of air: new equations for the visible and near infrared. , 1996, Applied optics.

[7]  K. Joo,et al.  Distance measurements by combined method based on a femtosecond pulse laser. , 2008, Optics express.

[8]  Jun Ye.  Absolute measurement of a long, arbitrary distance to less than an optical fringe. , 2004, Optics letters.

[9]  Seung-Woo Kim,et al.  Metrology: Combs rule , 2009 .

[10]  Young-Jin Kim,et al.  Absolute length measurement with the frequency comb of a femtosecond laser , 2009 .

[11]  Jan Herrmann,et al.  Subpicometer length measurement using heterodyne laser interferometry and all-digital rf phase meters. , 2010, Optics letters.

[12]  Peter J. de Groot,et al.  Unusual techniques for absolute distance measurement , 2001 .

[13]  T. Hausotte,et al.  Recent developments and challenges of nanopositioning and nanomeasuring technology , 2012 .

[14]  Garry Berkovic,et al.  Optical methods for distance and displacement measurements , 2012 .

[15]  N Bhattacharya,et al.  Many-wavelength interferometry with thousands of lasers for absolute distance measurement. , 2012, Physical review letters.

[16]  K. Minoshima,et al.  High-accuracy measurement of 240-m distance in an optical tunnel by use of a compact femtosecond laser. , 2000, Applied optics.

[17]  N. Schuhler,et al.  High-accuracy absolute distance measurement using frequency comb referenced multiwavelength source. , 2008, Applied optics.

[18]  Young-Jin Kim,et al.  Time-of-flight measurement with femtosecond light pulses , 2010 .

[19]  Young-Jin Kim,et al.  Absolute Distance Measurement using the Frequency Comb of a Femtosecond Laser , 2008 .

[20]  J. Jones,et al.  Optimum frequency selection in multifrequency interferometry. , 2003, Optics letters.

[21]  Young-Jin Kim,et al.  Parallel determination of absolute distances to multiple targets by time-of-flight measurement using femtosecond light pulses. , 2015, Optics express.

[22]  Young-Jin Kim,et al.  Absolute length calibration of gauge blocks using optical comb of a femtosecond pulse laser , 2006 .

[23]  Young-Jin Kim,et al.  All-fiber-based optical frequency generation from an Er-doped fiber femtosecond laser. , 2009, Optics express.

[24]  N. Bobroff.  Recent advances in displacement measuring interferometry , 1993 .

[25]  Young‐Jin Kim,et al.  Er-doped fiber frequency comb with mHz relative linewidth. , 2009, Optics Express.

[26]  N. Schuhler,et al.  Frequency-comb-referenced two-wavelength source for absolute distance measurement. , 2006, Optics letters.

[27]  H. K. Wickramasinghe,et al.  Absolute optical ranging with 200-nm resolution. , 1989, Optics letters.

[28]  Young-Jin Kim,et al.  Absolute distance measurement with extension of nonambiguity range using the frequency comb of a femtosecond laser , 2014 .

[29]  Young-Jin Kim,et al.  Frequency-comb-referenced multi-channel fiber laser for DWDM communication. , 2013, Optics express.

[30]  U. Minoni,et al.  Tunable, double-wavelength heterodyne detection interferometer for absolute-distance measurements. , 1994, Optics letters.

[31]  Ki-Nam Joo,et al.  Absolute distance measurement by dispersive interferometry using a femtosecond pulse laser. , 2006, Optics express.

[32]  L. Nenadovic,et al.  Rapid and precise absolute distance measurements at long range , 2009 .