Note: development of a volume-limited dot target for a high brightness extreme ultraviolet microplasma source.

We report on production of volume-limited dot targets based on electron beam lithographic and sputtering technologies for use in efficient high brightness extreme ultraviolet microplasma sources. We successfully produced cylindrical tin (Sn) targets with diameters of 10, 15, and 20 μm and a height of 150 nm. The calculated spectrum around 13.5 nm was in good agreement with that obtained experimentally.

[1]  S. Hädrich,et al.  Lensless diffractive imaging using tabletop coherent high-harmonic soft-X-ray beams. , 2007, Physical review letters.

[2]  Tsuyoshi Yamada,et al.  LPP-EUV light source development for high volume manufacturing lithography , 2013, Advanced Lithography.

[3]  Bowen Li,et al.  Feasibility study of broadband efficient ''water window'' source , 2012 .

[4]  H. Hertz,et al.  High‐resolution compact X‐ray microscopy , 2007, Journal of microscopy.

[5]  K. Koshelev,et al.  Physical processes in EUV sources for microlithography , 2011 .

[6]  A. Sakdinawat,et al.  Nanoscale X-ray imaging , 2009 .

[7]  Yong Wang,et al.  Relativistic plasma nanophotonics for ultrahigh energy density physics , 2013, Nature Photonics.

[8]  Taisuke Miura,et al.  Characteristics of extreme ultraviolet emission from mid-infrared laser-produced rare-earth Gd plasmas. , 2013, Optics express.

[9]  R. H. Stulen,et al.  Extreme ultraviolet lithography , 1998 .

[10]  S. Sinha,et al.  A Tribological Study of SU-8 Micro-Dot Patterns Printed on Si Surface in a Flat-on-Flat Reciprocating Sliding Test , 2011 .

[11]  Bowen Li,et al.  “Water window” sources: Selection based on the interplay of spectral properties and multilayer reflection bandwidth , 2013 .

[12]  Katsunobu Nishihara,et al.  Two dimensional radiation hydrodynamic simulation for extreme ultra-violet emission from laser-produced tin plasmas , 2008 .

[13]  T. Mocek,et al.  Evolution of laser-produced Sn extreme ultraviolet source diameter for high-brightness source , 2014 .

[14]  Mark S. Tillack,et al.  Dynamics of laser-produced Sn microplasma for a high-brightness extreme ultraviolet light source , 2011 .