论文信息 - State estimation for the VASIMR plasma engine

State estimation for the VASIMR plasma engine

This paper presents work on the application of virtual metrology techniques to the variable specific impulse magnetoplasma rocket (VASMIR) engine. The work concentrates on the estimation of internal temperatures of the rocket using state space models and optical emission spectroscopy (OES). These estimations are useful as direct thermal measurements will not be available in the final system design.

John Ringwood | Shane A. Lynn | Juan Ignacio Del Valle Gamboa

[1] Costas J. Spanos,et al. Plasma etch modeling using optical emission spectroscopy , 1996 .

[2] V. Clark,et al. Computer-aided multivariate analysis , 1991 .

[3] B. Moor,et al. Subspace state space system identification for industrial processes , 1998 .

[4] Richard Howell Goulding,et al. The Vasimr Engine: Project Status and Recent Accomplishments , 2004 .

[5] Gene F. Franklin,et al. Feedback Control of Dynamic Systems , 1986 .

[6] H. Yue,et al. Plasma etching endpoint detection using multiple wavelengths for small open-area wafers , 2001 .

[7] Jie Zhang,et al. Fault detection and diagnosis using multivariate statistical techniques : Process operations and control , 1996 .

[8] Jared P. Squire,et al. Principal VASIMR Results and Present Objectives , 2005 .

[9] G. G. Stokes. "J." , 1890, The New Yale Book of Quotations.

[10] C.H. Yu,et al. Virtual metrology: a solution for wafer to wafer advanced process control , 2005, ISSM 2005, IEEE International Symposium on Semiconductor Manufacturing, 2005..

[11] F. C. Díaz. The VASIMR Rocket. , 2000 .

[12] Eric R. Ziegel,et al. Engineering Statistics , 2004, Technometrics.