论文信息 - Extending the travel range of electrostatic micro-mirrors using insulator coated electrodes - 字舞流文

Extending the travel range of electrostatic micro-mirrors using insulator coated electrodes

K. R. Farmer | R. A. Brown | Xing-tao Wu | S. Mathews

[1] Steven K. Korotky,et al. Optical cross connects for optical networking , 1999, Bell Labs Technical Journal.

[2] O. Degani,et al. Pull-in study of an electrostatic torsion microactuator , 1998 .

[3] E. S. Hung,et al. Extending the travel range of analog-tuned electrostatic actuators , 1999 .