Extending the travel range of electrostatic micro-mirrors using insulator coated electrodes
暂无分享,去创建一个
[1] Steven K. Korotky,et al. Optical cross connects for optical networking , 1999, Bell Labs Technical Journal.
[2] O. Degani,et al. Pull-in study of an electrostatic torsion microactuator , 1998 .
[3] E. S. Hung,et al. Extending the travel range of analog-tuned electrostatic actuators , 1999 .