Acoustic wave-based NO2 sensor: Ink-jet printed active layer

Abstract Microsphere-templated BaCO 3 films with well-defined area were deposited onto quartz crystal microbalances by thermal ink-jet printing, and the devices were characterized with respect to their microstructures and NO 2 sensing characteristics. Highly porous three-dimensional BaCO 3 frameworks with promising sensor characteristics were obtained. The printed thin films exhibited reversible frequency shifts following exposure to NO 2 and subsequent recovery under CO/CO 2 at 400 °C. The feasibility of controlled deposition of complex functional films in controlled patterns is discussed in the context of the direct-write features of ink-jet printing.

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