Compact and high-speed ellipsometer

A compact and high-speed ellipsometer system with a new ellipsometric analyzer has been developed. Its size is 130 X 65 X 25 mm, and the weight 400 g including a light source and analyzers with no moving part. With an automatic x-(theta) stage, it takes only 20 seconds to obtain an area distribution map of a thin film-thickness on a 8-inch wafer at 2 mm pitch of 6,000 points. Its compactness and high-speed might make it widely applicable to various processes.