Design of wideband and high efficiency THz Yagi antenna by using air bridge technology

A wideband Yagi antenna used for THz integrated application has been successfully developed. The antenna is constructed by some air-gap Coplanar Waveguides (CPW) with different length. The air-gap CPWs are realized by the air bridge technology. A semiinsulating SiC substrate with thickness of 50um is used as the supporter of antenna. Due to the use of the air-gap CPW, the affection of substrate can be minimized because most filed will distribute in the air instead of the substrate. EM simulation is used to adjust the parameters of antenna for the performance optimization. Finally, the antenna with bandwidth more than 110GHz and the efficiency up to 85% is achieved. The results indicated that with significant enhancement of bandwidth and efficiency of the antenna, the proposed method has great potential in the design of high performance THz integrated circuits.