论文信息 - Investigation of thermal stability of multilayered Si/TiSi2Al and Si/TiSi2(TiN)WAl systems - 字舞流文

Investigation of thermal stability of multilayered Si/TiSi2Al and Si/TiSi2(TiN)WAl systems

A. G. Vasiliev | O. Lebedev | K. Valiev | A. Orlikovsky | A. Vasiliev | N. Kiselev | A. Sedelnikov