System for measurement of CCD parameters

This paper presents a system for measurement of CCD parameters that combines a photo-injection system and auto- focus systems. In the photo-injection system, a reverse microscope with plano-achromatic objective is used to produce a small light spot of (Phi) 2 micrometers . In the auto- focus system, astigmatic auto-focus method is applied. The auto-focus signal is detected by a simulation quadrate simulated by CCD. A piezoelectric transducer with high sensitivity and resolution is used to drive the focusing objective for a real-time control of the position of the small light spot which was required to be injected into one of pixels of CCD measured.