论文信息 - Effects of hydrogen etching on stress control in AlN interlayer inserted GaN MOVPE on Si - 字舞流文

Effects of hydrogen etching on stress control in AlN interlayer inserted GaN MOVPE on Si

Y. Nakano | H. Sodabanlu | M. Sugiyama | Hongbo Wang | A. Kumamoto | Cai Liu | Michihiro Suzuki | M. Suzuki