论文信息 - A Longitudinally Vibrating Touch Probe Sensor Using PZT Thin Film Vibrator

A Longitudinally Vibrating Touch Probe Sensor Using PZT Thin Film Vibrator

[1] Takefumi Kanda,et al. A flat type touch probe sensor using PZT thin film vibrator , 2000 .

[2] Takefumi Kanda,et al. Estimation of Resolution and Contact Force of a Longitudinally Vibrating Touch Probe Sensor Using Lead Zirconate Titanate(PZT) Thin-Film Vibrator. , 2001 .

[3] M. Kurosawa,et al. A rod-shaped vibro touch sensor using PZT thin film , 1998, Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176.

[4] S. M. Harb,et al. Resonator-based touch-sensitive probe , 1995 .

[5] Takaaki Tsurumi,et al. Preparation of Lead Zirconate Titanate Thin Film by Hydrothermal Method , 1991 .

[6] Takefumi Kanda,et al. Single Process to Deposit Lead Zirconate Titanate (PZT) Thin Film by a Hydrothermal Method , 1997 .