Design and testing of a fast tool servo for diamond turning
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[1] R. R. Donaldson,et al. Design And Construction Of A Large, Vertical Axis Diamond Turning Machine , 1983, Optics & Photonics.
[2] I. Mcwhirter,et al. A stable, rugged, capacitance-stabilised piezoelectric scanned Fabry-Perot etalon , 1981 .
[3] E. C. Teague,et al. Piezodriven 50‐μm range stage with subnanometer resolution , 1978 .
[4] Howard K. McCue. The Motion Control System For The Large Optics Diamond Turning Machine (LODTM) , 1983, Optics & Photonics.
[5] Edith L. R. Corliss,et al. Low noise broadband modulated preamplifiers for a variety of transducers , 1983 .
[6] T. R. Hicks,et al. The application of capacitance micrometry to the control of Fabry-Perot etalons , 1984 .