Design and testing of a fast tool servo for diamond turning

Abstract A self-contained and independently servo-operated diamond tool holder was built to increase the resolution and accuracy of a precision lathe. Its static and dynamic repeatability over a range of ± 50 μin (1.27 μm) is better than 0.05 μin (1.3 nm). Its frequency distortion from 0–100 Hz is less than 1.0 μin (25 nm) for a peak displacement of less than 28 μin (0.71 μm).