Hydrogen in Cvd Diamond Films

Understanding of the incorporation of hydrogen and its role in determining the properties of CVD diamond is critical to the successful commercial production of these films. Hydrogen is usually the most abundant impurity in solid-state CVD diamond and has been studied extensively by a variety of techniques, including nuclear magnetic resonance, infrared spectroscopy, and several others. This article reviews the application of a number of characterization methods to the study of hydrogen in CVD diamond, with particular attention toward understanding the incorporation of this impurity and its effect on properties of commercial significance.

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