论文信息 - The Impact on GaN MOS Capacitor Performance of In‐situ Processing in a Clustered ALD/ICP/RIE Tool - 字舞流文

The Impact on GaN MOS Capacitor Performance of In‐situ Processing in a Clustered ALD/ICP/RIE Tool

Sung-Jin Cho | Iain G. Thayne | David A. J. Moran | Ivor Guiney | Colin J. Humphreys | A. O'Mahony | Konstantinos Floros | Dilini Hemakumara | Xu Li | H. Knoops