Development and Fabrication of Electromagnetic Microactuators

In recent years several photoresists were introduced, tested, and optimized for the fabrication of components for electromagnetic microactuators. They serve as insulation layers as well as mold for electroplating of different materials like copper for conductors and nickel-iron alloys for soft magnetic functional structures. Several electromagnetic microactuators were developed and fabricated using these techniques. Over the past few years the actuators have become increasingly complex through the integration of additional components. The range of electromagnetic actuators could be completed by special polymer magnets which enable creation of any shape of hard magnetic structure. Thus, all types of electromagnetic actuators based on reluctance as well as the electro-dynamic principle can be realized.

[1]  Stephanus Büttgenbach,et al.  High aspect ratio spiral and vertical meander micro coils for actuator applications , 2004 .

[2]  S. Buettgenbach,et al.  Novel Micro Robots and Micro Motors using Lorentz Force Driven Linear Micro Actuators based on Polymer Magnets , 2006, INTERMAG 2006 - IEEE International Magnetics Conference.

[3]  Stephanus Büttgenbach,et al.  Novel synchronous linear and rotatory micro motors based on polymer magnets with organic and inorganic insulation layers , 2008 .

[4]  S. Buttgenbach,et al.  A Micro Linear Motor with Integrated Passive Magnetic Guidance , 2006, IECON 2006 - 32nd Annual Conference on IEEE Industrial Electronics.

[5]  S. Büttgenbach,et al.  Fabrication of drive and guide components for micro motors , 2008 .

[6]  Stephanus Büttgenbach,et al.  Micro gear pump with internal electromagnetic drive , 2010 .

[7]  B. Ponick,et al.  Specific design rules for micro linear motors , 2006, International Symposium on Power Electronics, Electrical Drives, Automation and Motion, 2006. SPEEDAM 2006..

[8]  S. Büttgenbach,et al.  Electromagnetic micro-actuators, micro-motors, and micro-robots , 2007, SPIE Micro + Nano Materials, Devices, and Applications.

[9]  S. Buttgenbach,et al.  Linear variable reluctance (VR) micro motor with horizontal flux guidance: concept, simulation, fabrication and test , 2003, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).

[10]  S. Buttgenbach,et al.  Linear Variable Reluctance (VR) Micro Motors With Compensated Attraction Force: Concept, Simulation, Fabrication and Test , 2007, IEEE Transactions on Magnetics.