Hexapod Systems for Ultra-High Vacuum Applications With Active Vibration Damping

For the LINC-NIRVANA (LN) project, MPIA requested an appropriate motorized mount for initial alignment of two dichroic beam splitters in the instrument [1]. These dich roic mirrors which reflect the visible light and transmit the NIR are located close to the pupil plane are therefore very sensitive to tilt and flexure errors which could be introduced to the wave-front sensor. Considering this the following high level specifications were requested in a very tight operating envelope: range of adjustment tip and tilt ±2° around the major axis of the elliptical mirror, resolution of adjustment 110Hz. Keyword list: Piezo, NEXLINE ® , PiezoWalk, nanopositioning, gimbal mount, mirror alignment