论文信息 - Fabrication of Atomic Force Microscope Probe with Low Spring Constant Using SU-8 Photoresist - 字舞流文

Fabrication of Atomic Force Microscope Probe with Low Spring Constant Using SU-8 Photoresist

Hongsik Park | Hyunjung Shin | Seungbum Hong | Jooho Moon | Sungdong Kim | J. Chung | Jae-Kuin Lee