论文信息 - Development of advanced CMOS-compatible bipolar transistor for BiCMOS technology

Development of advanced CMOS-compatible bipolar transistor for BiCMOS technology

A fully CMOS-compatible single-level polycide bipolar technology is studied. Two dimensional (2D) process simulations of the device have been carried out and compared with SIMS measurements. Fabrication steps, process simulations and first electrical results are presented and discussed.

A. Nouailhat | G. Giroult | A. Gerodolle | P. Delpech

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