Design of MEMS and microsystems: models and simulation

Various model systems are utilized in the process of design of integrated circuits, microsystems, microactuators, and microsensors. The models have their hierarchical levels that are mutually connected. The connection creates so-called "flow of models" system. It defines a system of simulation approaches to design of microsystems and microsensors. Models on different hierarchical levels and their mutual relations are discussed. Examples of utilization of equivalent models between different energy domains are presented. Analytical mathematical methods, numeric methods, or their hybrid combinations can be used for solution. Mutual interconnection represents design "flow". However, the "flow" solutions are not universal. For educational purposes, certain steps of the design (models) may be verified by realization of these models (subpart of the design). The principles are illustrated by the examples of design of an integrated strain gauge sensor and a wireless sensor system for pressure measurement. Presented examples are completed with reached results.