Optical effects of ion implantation

Publisher Summary A refractive index can be increased by ion implantation by changes in density and structure, by the addition of high-polarizability impurity ions, by a reduction of the plasma effect that increases the index and that is most important in the wavelength region far from the energy gap, and by absorption changing in the index in the region of the gap, that is, via the Kramers–Kronig relation. This chapter discusses the optical properties of implanted semiconductors, electrooptic components formed by ion implantation, general principles that determine most luminescent systems, effects of implantation temperature, luminescence centers in LiF-Mg-Ti radiation dosimeters, and use of line spectra in defect studies. In the LiF system, the luminescence bands are broad, and if alternative versions of the same complex exist, they cannot be resolved from the spectra. The addition, by implantation, of ions with incomplete inner electron shells opens up new possibilities as the lattice distortions of the free-ion energy levels are strongly perturbed by the defects in the neighborhood of the ion.

[1]  P. Townsend,et al.  Exciton luminescence from pure LiNbO3 , 1987 .

[2]  Optical damage resistance of ion-implanted LiNbO3 waveguides , 1987 .

[3]  P. J. Chandler,et al.  Refractive index profiles of ion implanted optical waveguides , 1986 .

[4]  R. Devine,et al.  Defect enhanced ultraviolet etching of amorphous insulators , 1986 .

[5]  P. Townsend,et al.  F and F2 centres in LiF induced by ion implantation , 1986 .

[6]  P. Townsend,et al.  Ion beam induced luminescence spectra of LiNbO3 , 1986 .

[7]  J. Comins,et al.  The production of defects and colloids in lithium fluoride crystals by implantation with rare gas ions , 1986 .

[8]  P. Townsend Ion implantation—an introduction , 1986 .

[9]  P. Townsend,et al.  A method of poling LiNbO3 and LiTaO3 below Tc , 1986 .

[10]  P. J. Chandler,et al.  A New Approach to the Determination of Planar Waveguide Profiles by Means of a Non-stationary Mode Index Calculation , 1986 .

[11]  P. Townsend,et al.  Ion implantation in LiF to form F and F2 centres , 1986 .

[12]  P. J. Chandler,et al.  Refractive index changes formed by N+ implants in silica , 1986 .

[13]  Effect of annealing on the optical properties of ion‐implanted Ge , 1985 .

[14]  D. Brown,et al.  Formation of subsurface Al 2O 3 layers in aluminum by oxygen ion implantation , 1985 .

[15]  B. Appleton,et al.  Thermal annealing of Fe implanted Al2O3 in an oxidizing and reducing environment , 1985 .

[16]  P. Thévenard,et al.  Ion beam effects on small metallic precipitates (Na) buried in an insulating material (MgO) , 1985 .

[17]  B. Appleton,et al.  Formation of amorphous layers in Al2O3 by ion implantation , 1985 .

[18]  G. Battaglin,et al.  Enhanced diffusion processes in Ar+ implanted alkali-containing glasses , 1985 .

[19]  T. Hioki,et al.  Effect of ion implantation on fracture stress of Al2O3 , 1985 .

[20]  W. Brenig,et al.  Desorption Induced by Electronic Transitions DIET II , 1985 .

[21]  P. Mazzoldi,et al.  Antireflective Effects on a Soda-Lime Glass Induced by Ar+ Implantation , 2006 .

[22]  P. Townsend,et al.  Electronically induced sputtering of UF4 , 1984 .

[23]  O. Auciello,et al.  Ion Bombardment Modification of Surfaces: Fundamentals and Applications , 1984 .

[24]  W. Burns,et al.  Linear interferometric modulators in Ti:LiNbO 3 , 1984 .

[25]  I. Wilson,et al.  Synthesis of Al2O3 by ion implantation of oxygen into aluminium , 1984 .

[26]  H. Matzke,et al.  Fracture toughness and leaching behavior of ion bombarded waste glasses , 1984 .

[27]  J. Bibring,et al.  Synthesis of molecules by implantation in insulators , 1984 .

[28]  A. Perez Ion implantation effects in crystalline inorganic insulators , 1984 .

[29]  P. N. Gibson,et al.  Radiation damage in silica-based glasses: Point defects, microstructural changes and possible implications on etching and leaching , 1984 .

[30]  G. Griffiths,et al.  Analysis of titanium diffused planar optical waveguides in lithium niobate , 1984, IEEE Journal of Quantum Electronics.

[31]  P. Townsend,et al.  Acousto-optic diffraction of optical guided waves in crystal quartz , 1984 .

[32]  W. Lanford,et al.  Ion beam mixing of AG on glass , 1984 .

[33]  H. Bach,et al.  Analysis of sodium on glass surfaces disturbed by ion-beam induced absorption currents , 1984 .

[34]  R. Kelly The mechanisms of sputtering part I. , 1984 .

[35]  J. Hawkes,et al.  Optoelectronics: An Introduction , 1984 .

[36]  P. D. Townsend The Use Of Ion Implantation For Thin Film Optics , 1983, Other Conferences.

[37]  I. K. Naik Low‐loss integrated optical waveguides fabricated by nitrogen ion implantation , 1983 .

[38]  R. Devine,et al.  E1′ defect profiles in Ar implanted SiO2 , 1983 .

[39]  T. Tyliszczak,et al.  Conversion electron Mössbauer study of LiF implanted with 57Fe ions , 1983 .

[40]  W. Lanford,et al.  Effects of ion implantation on the reaction between water and glass , 1983 .

[41]  M. Kryder,et al.  The effect of ion implantation on epitaxial magnetic garnet thin films , 1983 .

[42]  G. W. Arnold,et al.  Ion-beam analysis of implanted simulated nuclear waste glasses , 1983 .

[43]  F. Ferrieu,et al.  A study of Ar implantation induced defects in SiO2 , 1983 .

[44]  Paolo Mazzoldi,et al.  Properties of ion implanted glasses , 1983 .

[45]  P. Townsend,et al.  Radiation enhanced diffusion of krypton and uranium impurities in LiF , 1983 .

[46]  G. Götz,et al.  Ion implantation into LiNbO3 , 1983 .

[47]  A. Yi-yan,et al.  Index instabilities in proton‐exchanged LiNbO3 waveguides , 1983 .

[48]  O. W. Holland,et al.  Ion implantation and thermal annealing of α‐Al2O3 single crystals , 1983 .

[49]  C. Tang,et al.  Ion implanted grating couplers for optical waveguides , 1983 .

[50]  A. Miotello,et al.  Sputtering process during ion implantation in glasses: mathematical and physical analysis , 1983 .

[51]  M. N. Armenise,et al.  Characterization of (Ti0.65Nb0.35)O2 compound as a source for Ti diffusion during Ti:LiNbO3 optical waveguides fabrication , 1983 .

[52]  T. Banwell,et al.  Depth Dependence and Chemical Effects in Ion Mixing of Ni on SiO 2 , 1983 .

[53]  A. Hughes Colloid formation in irradiated insulators , 1983 .

[54]  G. W. Arnold Radiation damage effects in nuclear waste glasses , 1983 .

[55]  M. Martini,et al.  Efficiency of various ionizing particles (beta, p, d, alpha) in causing the “pre-dose effect” in SiO2 , 1983 .

[56]  P. Hansen,et al.  The annealing behavior of ion-irradiated garnet crystals , 1983 .

[57]  P. J. Cressman,et al.  Optical Damage Resistance Of Lithium Niobate Waveguides , 1982, Other Conferences.

[58]  C. E. Land,et al.  Photographic-image storage in ion-implanted PLZT ceramics , 1982 .

[59]  G. Battaglin,et al.  Modifications of sodium concentration profiles after electron and proton irradiation of glasses , 1982 .

[60]  P. Townsend,et al.  I - The emission spectra of tl produced by ion implanted CaF2 , 1982 .

[61]  B. Henderson On the nature, characterisation and applications of point defects in insulators , 1982 .

[62]  B. Henderson,et al.  Ion implantation in alkaline earth oxides , 1982 .

[63]  H. Matzke Radiation damage in crystalline insulators, oxides and ceramic nuclear fuels , 1982 .

[64]  C. N. Waddell,et al.  Infrared studies of isothermal annealing of ion‐implanted silicon: Refractive indices, regrowth rates, and carrier profiles , 1982 .

[65]  P. Townsend Electron and photon sputtering of alkali halides , 1982 .

[66]  E. Voges,et al.  Strip waveguides in LiNbO 3 fabricated by combined metal diffusion and ion implantation , 1982 .

[67]  W. G. Spitzer,et al.  Effects of thermal annealing on the refractive index of amorphous silicon produced by ion implantation , 1982 .

[68]  F. J. Bryant Ion implantation and luminescence , 1982 .

[69]  P. N. Gibson,et al.  Comparison of heavy-ion, proton and electron irradiation effects in vitreous silica , 1982 .

[70]  K. Heidemann The optical properties of SiOx formed by high-dose Si ion implantation into fused silica , 1982 .

[71]  Paolo Mazzoldi,et al.  Optical, chemical and mechanical modifications induced by ion implantation on glass surfaces , 1982 .

[72]  P.J.R. Laybourn,et al.  Integrated optics: a tutorial review , 1981 .

[73]  K. Heidemann,et al.  Complex-refractive-index profiles of 4 MeV Ge ion-irradiation damage in silicon , 1981 .

[74]  A. Perez,et al.  Spinel ferrite formation in iron implanted MgO crystals , 1981 .

[75]  R. Kelly Phase changes in insulators produced by particle bombardment , 1981 .

[76]  C. E. Land,et al.  Optical image storage in ion implanted PLZT ceramics , 1981 .

[77]  J. Dupin,et al.  Evidence of new phase creation in implanted TiO2 , 1981 .

[78]  Y. Langevin,et al.  Ion implantation effects in insulators and the long-term stability of radioactive waste storage materials , 1981 .

[79]  P. Townsend,et al.  Luminescence during ion implantation of silica , 1981 .

[80]  Rafi Kalish,et al.  Damage and lattice location studies in high‐temperature ion‐implanted diamond , 1981 .

[81]  G. W. Arnold Ion implantation effects in glasses , 1981 .

[82]  G. W. Arnold,et al.  Ion-implantation-induced phase separation and crystallization in lithia-silica glasses☆ , 1981 .

[83]  E. Voges,et al.  Refractive Index Profiles of Helium Implanted LiNbO3 and LiTaO3 , 1980, October 16.

[84]  H. Suche,et al.  Optical parametric amplification in Ti‐diffused LiNbO3 waveguides , 1980 .

[85]  J. Biersack,et al.  A Monte Carlo computer program for the transport of energetic ions in amorphous targets , 1980 .

[86]  C. Joffrin,et al.  Activité acoustique et loi de dispersion : le quartz et le chlorate de sodium , 1980 .

[87]  E. Voges,et al.  Refractive index profiles of ion-implanted fused silica , 1980 .

[88]  W. Burns,et al.  Applications of ion implantation to integrated optical spectrum analyzers. , 1980, Optics letters.

[89]  M. Williams,et al.  The energy deposition of slowing down particles in heterogeneous media , 1980 .

[90]  C. N. Waddell,et al.  Optical effects resulting from deep implants of silicon with nitrogen and phosphorus , 1980 .

[91]  P. Townsend Photon-induced sputtering , 1979 .

[92]  Gérard Destefanis,et al.  The formation of waveguides and modulators in LiNbO3 by ion implantation , 1979 .

[93]  S. Jain,et al.  Metal colloids in ionic crystals , 1979 .

[94]  L. Pranevicius,et al.  The influence of ion-implantation-induced stress on the properties of magnetic bubble garnets , 1979 .

[95]  C. N. Waddell,et al.  High‐fluence implantations of silicon: Layer thickness and refractive indices , 1979 .

[96]  H. Hay,et al.  Helium irradiation of alkali hailides , 1979 .

[97]  C. C. Yu,et al.  Luminescence centres with cubic symmetry in erbium-implanted zinc sulphide , 1979 .

[98]  M. Aguilar,et al.  Luminescence of NaCl—I. Electron and ion beam excited spectra , 1979 .

[99]  P. J. Chandler,et al.  Implantation temperature measurement using impurity luminescence , 1979 .

[100]  P. J. Chandler,et al.  ION beam induced luminescence in fused silica , 1979 .

[101]  E. Voges,et al.  Index profiles of planar optical waveguides determined from the angular dependence of reflectivity , 1978 .

[102]  P. Townsend,et al.  The effectiveness of the implantation of oxygen in increasing the luminescence from LiF:Mg:Ti , 1978 .

[103]  E. P. Eernisse,et al.  Volume expansion and annealing compaction of ion‐bombarded single‐crystal and polycrystalline α‐Al2O3 , 1978 .

[104]  M. Olivier,et al.  Characterization of silicon layers via guided wave optics , 1978 .

[105]  Gérard Destefanis,et al.  Optical waveguides in LiNbO3 formed by ion implantation of helium , 1978 .

[106]  J. Donnelly,et al.  Ion‐implanted n‐ and p‐type layers in InP , 1977 .

[107]  M. Nunoshita,et al.  Mode control of Ti-diffused LiNbO(3) slab optical waveguide. , 1977, Applied optics.

[108]  Y. Ayant,et al.  Étude à l'aide de l'optique intégrée des processus de diffusion et d'échange d'ions dans un verre alcalin , 1977 .

[109]  E. P. Eernisse Stress in ion‐implanted CVD Si3N4 films , 1977 .

[110]  P. Townsend,et al.  Absorption bands induced in KBr by H+ and H2+ implantation , 1977 .

[111]  J. Deutsch,et al.  Planar optical waveguides achieved by ion implantation in zinc telluride: general characteristics. , 1977, Applied optics.

[112]  P. Tien Integrated optics and new wave phenomena in optical waveguides , 1977 .

[113]  G. W. Arnold,et al.  Aggregation and migration of ion‐implanted silver in lithia‐alumina‐silica glass , 1977 .

[114]  T. A. Dellin,et al.  Volume, index‐of‐refraction, and stress changes in electron‐irradiated vitreous silica , 1977 .

[115]  P. Townsend Ion implantation and integrated optics , 1977 .

[116]  C. Lerner,et al.  Structural, electronic and magnetic properties of splat-quenched FeCx alloys (x⩽0.05) , 1977 .

[117]  R. B. Murray,et al.  Ion bombardment of alkali halides, III: Track-effect analysis of measured damage profiles in KCl , 1977 .

[118]  F. J. Bryant,et al.  The effect of non-stoichiometry on the implantation of ytterbium in cadmium telluride , 1977 .

[119]  W. Burns,et al.  Mode dispersion in diffused channel waveguides by the effective index method. , 1977, Applied optics.

[120]  J. Pautrat,et al.  Anomalous penetration of implanted 65Zn and compensated zone build-up in ZnTe crystals , 1976 .

[121]  W. Spitzer,et al.  Measurements of layer thicknesses and refractive indices in high‐energy ion‐implanted GaAs and GaP , 1976 .

[122]  P. Townsend,et al.  Optical waveguides formed by low‐energy electron irradiation of silica , 1976 .

[123]  W. K. Burns,et al.  Active branching waveguide modulator (A) , 1976 .

[124]  R. Rue,et al.  Electro-optic Y-junction modulator/switch , 1976 .

[125]  W. Spitzer,et al.  Refractive index of ion-implanted GaAs , 1976 .

[126]  R. Schmidt,et al.  Switched directional couplers with alternating Δ Β , 1976 .

[127]  P. D. Townsend,et al.  Refractive index profiles induced by ion implantation into silica , 1976 .

[128]  S. Furukawa,et al.  Lateral spread of damage formed by ion implantation , 1976 .

[129]  Herwig Kogelnik,et al.  Electro‐optically switched coupler with stepped Δβ reversal using Ti‐diffused LiNbO3 waveguides , 1976 .

[130]  S. Pantelides,et al.  Electronic structure, spectra, and properties of 4:2-coordinated materials. I. Crystalline and amorphousSiO2andGeO2 , 1976 .

[131]  N. Itoh,et al.  A new emission band under high density excitation in alkali halides , 1976 .

[132]  J. Davenas,et al.  Ionisation induced defects in alkali halide single crystals , 1976 .

[133]  P. Townsend,et al.  Ion implantation, sputtering and their applications , 1976 .

[134]  G. Thomas,et al.  Hydrogen and helium implantation in vitreous silica , 1976 .

[135]  A. J. Houghton,et al.  Changes in the chemical stability of ion-implanted silica glass , 1976 .

[136]  F. Edelman,et al.  Formation of SiC and Si3N4 in silicon by ion implantation , 1976 .

[137]  W. Tsang,et al.  Thin‐film beam splitter and reflector for optical guided waves , 1975 .

[138]  J. Hauser,et al.  Ion implanted photodiode detectors in epitaxial (Ga(x) In(1-x))As. , 1975, Applied optics.

[139]  E. P. Eernisse,et al.  Effect of Ionizing Radiation on Displacement Damage in Ion-Bmcbarded Single Crystal α-A12O3 and α-SiO2 , 1975, IEEE Transactions on Nuclear Science.

[140]  Juichi Noda,et al.  Electro-optic light modulator with branched ridge waveguide , 1975 .

[141]  S. Furukawa,et al.  Theoretical Considerations in Lateral Damage Distribution Formed by Ion-Implantation , 1975 .

[142]  D. Davies,et al.  Low-resistivity n-type layers in InAs x P 1-x by ion implantation , 1975 .

[143]  A. J. Houghton,et al.  Dispersion measurements of optical waveguides , 1975 .

[144]  Charles Vassallo Etude du profil d'indice d'un guide optique plan: quelques applications de la méthode B.K.W. , 1975 .

[145]  M. Werner,et al.  Electrically switched optical directional coupler: COBRA , 1975, IEEE Journal of Quantum Electronics.

[146]  Joe C. Campbell,et al.  GaAs electro‐optic directional‐coupler switch , 1975 .

[147]  Optical waveguides in LiNbO3 by ion exchange technique , 1975 .

[148]  C. Tseng,et al.  A thin-film prism as a beam separator for multimode guided waves in integrated optics , 1975 .

[149]  A. Yariv,et al.  GaAs and GaAlAs Devices for Integrated Optics . , 1975 .

[150]  P. Townsend,et al.  Mechanisms of defect formation , 1975 .

[151]  V. Ramaswamy,et al.  Nb‐diffused LiTaO3 optical waveguides: Planar and embedded strip guides , 1974 .

[152]  P. W. Levy,et al.  Thermoluminescence of LiF TLD-100 dosimeter crystals , 1974 .

[153]  F. Zernike Luneburg lens for optical waveguide use , 1974 .

[154]  E. P. EerNisse,et al.  Introduction rates and annealing of defects in ion‐implanted SiO2 layers on Si , 1974 .

[155]  W. Caton Propagation constants in diffused planar optical waveguides. , 1974, Applied optics.

[156]  G. W. Arnold,et al.  Atomic displacement and ionization effects on the optical absorption and structural properties of ion‐implanted Al2O3 , 1974 .

[157]  A. Hughes,et al.  Fluorescence spectra of Gd3+ ions in CaO , 1974 .

[158]  A. Gédéon,et al.  Comparison between rigorous theory and WKB-analysis of modes in graded-index waveguides , 1974 .

[159]  A. Hughes,et al.  Absorption and luminescence of bismuth ions implanted into CaO and MgO single crystals , 1974 .

[160]  I. Kaminow,et al.  Metal‐diffused optical waveguides in LiNbO3 , 1974 .

[161]  I P Kaminow,et al.  Diffusion kinetics and optical waveguiding properties of outdiffused layers in lithium niobate and lithium tantalate. , 1974, Applied optics.

[162]  L. R. Bloom,et al.  Large refractive index change induced by ion implantation in lithium niobate , 1974 .

[163]  E. P. EerNisse,et al.  Ionization dilatation effects in fused silica from 2 to 18‐keV electron irradiation , 1974 .

[164]  Juichi Noda,et al.  Fabrication of optical waveguiding layer in LiTaO3 by Cu diffusion , 1974 .

[165]  S HarperJohn,et al.  High resolution lenses for optical waveguides , 1974 .

[166]  S. Namba,et al.  Optical Waveguides Fabricated by B Ion Implanted into Fused Quartz , 1974 .

[167]  A. Yariv,et al.  Guided wave optics , 1974 .

[168]  E. Conwell Optical waveguiding in graded‐index layers , 1974 .

[169]  W. Spitzer,et al.  Infrared reflection of ion‐implanted GaAs , 1974 .

[170]  Matt Lehmann,et al.  Extinction technique for optical storage using anisotropic color centers in alkali halides , 1974 .

[171]  R. Hunsperger,et al.  Ion‐implanted GaAs injection laser , 1974 .

[172]  R. J. Martin,et al.  Two‐layered construction of integrated optical circuits and formation of thin‐film prisms, lenses, and reflectors , 1974 .

[173]  H. M. Presby,et al.  Refractive index variations in proton‐bombared fused silica , 1974 .

[174]  David Y. Smith,et al.  Color Centres and Imperfections in Insulators and Semiconductors , 1974 .

[175]  S. Namba,et al.  Formation of Hg1-xCdxTe by Ion Implantation , 1974 .

[176]  M. Adams,et al.  Effects of doping and free carriers on the refractive index of direct-gap semiconductors , 1974 .

[177]  S. Namba,et al.  Hall Effect Measurements of Zn Implanted GaAs , 1974 .

[178]  S. H. Wemple,et al.  Optical and channeling studies of ion‐bombarded GaP , 1974 .

[179]  T. Itoh,et al.  Zinc ion implantation into GaAs0.62P0.38 , 1974 .

[180]  Y. S. Park,et al.  Injection electroluminescence in phosphorous‐ion‐implanted ZnSe p‐n junction diodes , 1974 .

[181]  J. Bourgoin,et al.  EPR measurements in ion-implanted diamond , 1974 .

[182]  J. Davies EPR and ENDOR of titanium-doped fluoride , 1974 .

[183]  B. Streetman,et al.  Photoluminescence of nitrogen‐implanted GaAs1−xPx , 1974 .

[184]  H. Furuta,et al.  Novel optical waveguide for integrated optics. , 1974, Applied optics.

[185]  E. P. EerNisse,et al.  Compaction of ion‐implanted fused silica , 1974 .

[186]  H. Holloway,et al.  Photodiodes fabricated in epitaxial PbTe by Sb + ion implantation , 1973 .

[187]  A. Yariv,et al.  Proton-implanted optical waveguide detectors in GaAs , 1973 .

[188]  S. Namba,et al.  Effects of Implantation Temperature on Lattice Location of Tellurium Implanted in Gallium Arsenide , 1973 .

[189]  James W. Mayer,et al.  Ion implantation in semiconductors , 1973 .

[190]  D. Davies,et al.  Compensation from implantation in GaAs , 1973 .

[191]  R Ulrich,et al.  Measurement of thin film parameters with a prism coupler. , 1973, Applied optics.

[192]  D. Diguet,et al.  Electrical properties of proton‐bombarded Ga1−xAlxAs , 1973 .

[193]  T. Itoh,et al.  Ga(AsP) light‐emitting diode formed by ion implantation , 1973 .

[194]  R. Petit,et al.  Determination of the coupling coefficient of a holographic thin film coupler , 1973 .

[195]  R. Ulrich,et al.  Efficiency of optical-grating couplers , 1973 .

[196]  P. Hemenger,et al.  Zinc ion implantation of sulfur‐doped GaP , 1973 .

[197]  F. Svelto,et al.  Hg‐implanted Hg1−x Cdx Te infrared photovoltaic detectors in the 8‐ to 14‐μm range , 1973 .

[198]  R. Wolfe,et al.  Differential etching of ion-implanted garnet , 1973 .

[199]  Esther M. Conwell,et al.  Modes in optical waveguides formed by diffusion , 1973 .

[200]  M. Neviere,et al.  Systematic study of resonances of holographic thin film couplers , 1973 .

[201]  W. J. Choyke,et al.  Efficient luminescence centers in H- and D-implanted 6H SiC , 1973 .

[202]  J. Hammer,et al.  Fast electro‐optic waveguide deflector modulator , 1973 .

[203]  H. F. Taylor,et al.  Frequency-selective coupling in parallel dielectric waveguides☆ , 1973 .

[204]  W. Martin Waveguide electro-optic modulation in II-VI compounds , 1973 .

[205]  P. Tien,et al.  Formation of light-guiding interconnections in an integrated optical circuit by composite tapered-film coupling. , 1973, Applied optics.

[206]  J. Davenas,et al.  F‐centre profiles associated with electronic stopping power in LiF bombarded with high energy ions , 1973 .

[207]  K. Furuya,et al.  Focusing properties of thin‐film lenslike light guide for integrated optics , 1973 .

[208]  N. Itoh,et al.  H-center interactions during thermal annealing in KBr , 1973 .

[209]  Hiroyoshi Yajima,et al.  Dielectric thin‐film optical branching waveguide , 1973 .

[210]  P. Townsend,et al.  Ellipsometric analysis of refractive index profiles produced by ion implantation in silica glass , 1973 .

[211]  M. Neviere,et al.  About the theory of optical grating coupler-waveguide systems , 1973 .

[212]  J. Carruthers,et al.  Optical waveguiding layers in LiNbO3 and LiTaO3 , 1973 .

[213]  A. Yariv,et al.  Channel optical waveguide directional couplers , 1973 .

[214]  R. S. Nelson,et al.  Ion implantation , 1973 .

[215]  J. North,et al.  Electrical and optical properties of proton‐bombarded gallium phosphide , 1973 .

[216]  A. Bayly Optical properties of ion bombarded silica glass , 1973 .

[217]  G. Ewan,et al.  Cadmium implanted gallium arsenide–a study of residual bombardment disorder and Atom location , 1973 .

[218]  M. Labrune,et al.  Investigation of magnetic domain structures in { 111 } silicon-iron single crystals , 1973 .

[219]  James S. Harris,et al.  Influence of implantation temperature and surface protection on tellurium implantation in GaAs , 1972 .

[220]  T. Tuomi,et al.  Metal-like Plasma Resonance in Fast-Neutron-Irradiated GaAs Observed by Means of Electroreflectance , 1972 .

[221]  Amnon Yariv,et al.  Optical waveguiding in proton-implanted GaAs , 1972 .

[222]  Ion bombardment fabrication of optical waveguides using electron resist masks , 1972 .

[223]  W. Gibson,et al.  Radiation‐Damage‐Induced Apparent Optical Absorption Interpreted as Scattering from Defect Zones , 1972 .

[224]  J. Donnelly,et al.  p‐n Junction Photodiodes in PbTe Prepared by Sb+ Ion Implantation , 1972 .

[225]  J. Davenas,et al.  Coloration of LiF by 56 MeV α‐particles and 28 MeV deuterons. II. F 2+ centre evolution , 1972 .

[226]  J. Davenas,et al.  Coloration of LiF by 56 MeV α-particles and 28 MeV deuterons I. Observation of colour centres produced at room temperature , 1972 .

[227]  N. S. Kapany,et al.  Optical Waveguides , 1972 .

[228]  H. Hughes,et al.  Dependence of MOS Device Radiation-Sensitivity on Oxide Impurities , 1972 .

[229]  B. Miller,et al.  Efficient GaAs–AlxGa1−xAs Double‐Heterostructure Light Modulators , 1972 .

[230]  Amnon Yariv,et al.  Integrated Optics , 2019, The Microflow Cytometer.

[231]  R. Ulrich,et al.  Optimum Excitation of Optical Surface Waves , 1971 .

[232]  E. Wolf,et al.  Anneal Behavior of Cd Ion Implanted GaAs , 1971 .

[233]  P. Tien Light waves in thin films and integrated optics. , 1971, Applied optics.

[234]  S. C. Ellis,et al.  Titanium as a luminescence centre in thermoluminescent lithium fluoride , 1971 .

[235]  D. Marcuse,et al.  The coupling of degenerate modes in two parallel dielectric waveguides , 1971 .

[236]  J. Donnelly,et al.  TYPE CONVERSION AND n‐p JUNCTION FORMATION IN Hg1−xCdxTe PRODUCED BY PROTON BOMBARDMENT , 1971 .

[237]  G. D. Watkins,et al.  Radiation effects in semiconductors , 1971 .

[238]  S. Namba,et al.  Diffusion of Defects in Low Temperature Ion Implanted GaAs , 1971 .

[239]  Y. S. Park,et al.  TYPE CONVERSION AND p-n JUNCTION FORMATION IN LITHIUM-ION-IMPLANTED ZnSe. , 1971 .

[240]  M. Mayhugh COLOR CENTERS AND THE THERMOLUMINESCENCE MECHANISM IN LiF. , 1970 .

[241]  P. K. Tien,et al.  Theory of Prism–Film Coupler and Thin-Film Light Guides , 1970 .

[242]  R. Ulrich,et al.  Theory of the Prism–Film Coupler by Plane-Wave Analysis , 1970 .

[243]  J. H. Harris,et al.  Beam Coupling to Films , 1970 .

[244]  J. P. Donnelly,et al.  MIS ELECTROLUMINESCENT DIODES IN ZnTe. , 1970 .

[245]  J. Donnelly,et al.  n‐p JUNCTION PHOTODETECTORS IN InSb FABRICATED BY PROTON BOMBARDMENT , 1970 .

[246]  J. Davey,et al.  Effects of Neutron Irradiation on the Optical Properties of Thin Films and Bulk GaAs and GaP , 1970 .

[247]  W. H. Lucke,et al.  ION‐IMPLANTATION INDUCED OPTICAL ABSORPTION EDGE SHIFTS IN GaP , 1970 .

[248]  R. E. Whan,et al.  LATTICE EXPANSION AND STRAIN IN ION-BOMBARDED GaAs AND Si. , 1970 .

[249]  M. Brodsky,et al.  ESR AND OPTICAL ABSORPTION STUDIES OF ION‐IMPLANTED SILICON , 1970 .

[250]  R. Hunsperger,et al.  LATTICE DISORDER PRODUCED IN GaAs BY 60-keV Cd IONS AND 70-keV Zn IONS. , 1970 .

[251]  R. Hunsperger,et al.  Electrical properties of Cd, Zn and S ion-implanted layers in GaAs , 1970 .

[252]  H. Schiøtt Approximations and interpolation rules for ranges and range stragglings , 1970 .

[253]  H. Stein Electrical Studies of Low‐Temperature Neutron‐ and Electron‐Irradiated Epitaxial n‐Type GaAs , 1969 .

[254]  E. A. J. Marcatili,et al.  Dielectric rectangular waveguide and directional coupler for integrated optics , 1969 .

[255]  J. Goell A circular-harmonic computer analysis of rectangular dielectric waveguides , 1969 .

[256]  F. S. Chen,et al.  Optically Induced Change of Refractive Indices in LiNbO3 and LiTaO3 , 1969 .

[257]  Joseph P. Donnelly,et al.  EFFICIENT DOPING OF GaAs BY Se+ ION IMPLANTATION , 1969 .

[258]  R. J. Martin,et al.  MODES OF PROPAGATING LIGHT WAVES IN THIN DEPOSITED SEMICONDUCTOR FILMS , 1969 .

[259]  R. Hunsperger,et al.  Electrical Properties of Zinc and Cadmium Ion Implanted Layers in Gallium Arsenide , 1969 .

[260]  J. Marley,et al.  TYPE CONVERSION AND p‐n JUNCTION FORMATION IN ION‐IMPLANTED ZnTe , 1969 .

[261]  P. Roughan,et al.  Properties of Ion‐Implanted GaAs Diodes , 1969 .

[262]  D. F. Nelson,et al.  Electro-Optic and Waveguide Properties of Reverse-Biased Gallium Phosphidep−nJunctions , 1969 .

[263]  R. S. Nelson,et al.  Electron microscope investigation of damage structure in gallium-arsenide bombarded with neon ions , 1969 .

[264]  U. Bonse,et al.  X‐Ray Investigation of Lattice Deformations in Silicon Induced through High‐Energy Ion Implantation , 1969 .

[265]  R. Shubert,et al.  Optical Surface Waves on Thin Films and Their Application to Integrated Data Processors , 1968 .

[266]  C. Mead,et al.  THE PRESENCE OF DEEP LEVELS IN ION IMPLANTED JUNCTIONS , 1968 .

[267]  E. R. Schineller,et al.  Optical Waveguides Formed by Proton Irradiation of Fused Silica , 1968 .

[268]  F. Reinhart Reverse‐Biased Gallium Phosphide Diodes as High‐Frequency Light Modulators , 1968 .

[269]  G. Eldridge,et al.  HIGH CONDUCTIVITY p‐TYPE CdS , 1968 .

[270]  W. B. Fowler,et al.  Physics of color centers , 1968 .

[271]  G. Carter,et al.  Ion bombardment of solids , 1968 .

[272]  E. Teague,et al.  OBSERVATION OF MISFIT DISLOCATIONS IN GaAs–Ge HETEROJUNCTIONS , 1967 .

[273]  J. Mayer,et al.  Zn and Te Implantations into GaAs , 1967 .

[274]  W. S. Ginell,et al.  Effect of Fast-Neutron Irradiation on Optical Attenuation in Compound Semiconductors , 1967 .

[275]  W. S. Ginell,et al.  Theory of Anomalous Infrared Attenuation in Neutron-Irradiated Compound Semiconductors , 1967 .

[276]  Ivan P. Kaminow,et al.  Electrooptic light modulators , 1966 .

[277]  D. Pooley The saturation of F-centre production in alkali halides under proton irradiation , 1966 .

[278]  G. Convert Submillimeter waves , 1966 .

[279]  O. Hauser,et al.  Strahleninduzierte Phasenumwandlungen einiger Substanzen des Perowskit‐Gittertyps und ihre thermodynamische Behandlung , 1966 .

[280]  Alan L. Jones Coupling of Optical Fibers and Scattering in Fibers , 1965 .

[281]  F. Wallace FIBER OPTICS. , 1965, Hospital topics.

[282]  D. F. Nelson,et al.  LIGHT MODULATION BY THE ELECTRO‐OPTIC EFFECT IN REVERSE‐BIASED GaP P‐N JUNCTIONS , 1964 .

[283]  W. F. Libby,et al.  Artificial Metals: InSb, the Sn Alloys with InSb, and Metallic InTe , 1964 .

[284]  H. Queisser,et al.  Diffusion‐Induced Dislocations in Silicon , 1964 .

[285]  T. S. Shilliday,et al.  Radiation Effects in GaAs , 1963 .

[286]  W. F. Libby,et al.  Indium Antimonide: Superconductivity of the Metallic Form , 1963, Science.

[287]  W. F. Libby,et al.  Indium Antimonide: the Metallic Form at Atmospheric Pressure , 1963, Science.

[288]  H. Ehrenreich,et al.  Optical Properties of Semiconductors , 1963 .

[289]  H. G. Drickamer,et al.  Pressure induced phase transitions in some II–VI compounds , 1962 .

[290]  H. G. Drickamer,et al.  Pressure induced phase transitions in silicon, germanium and some III–V compounds , 1962 .

[291]  H. Queisser,et al.  X‐Ray Observations of Diffusion‐Induced Dislocations in Silicon , 1962 .

[292]  H. Queisser Slip Patterns on Boron‐Doped Silicon Surfaces , 1961 .

[293]  R. Arndt,et al.  RADIATION EFFECTS OF BOMBARDMENT OF QUARTZ AND VITREOUS SILICA BY 7.5-kev TO 59-kev POSITIVE IONS , 1960 .

[294]  広 久保田,et al.  Principle of Optics , 1960 .

[295]  H. G. Drickamer,et al.  The effect of pressure on zinc blende and wurtzite structures , 1959 .

[296]  R. Balluffi,et al.  Structure of Deuteron-Irradiated Germanium , 1959 .

[297]  W. Doyle Absorption of Light by Colloids in Alkali Halide Crystals , 1958 .

[298]  William Primak,et al.  Fast-Neutron-Induced Changes in Quartz and Vitreous Silica , 1958 .

[299]  U. Gonser,et al.  RADIATION DAMAGE EXPERIMENTS AND THE NATURE OF THERMAL SPIKES IN III-V COMPOUNDS , 1958 .

[300]  D. Kleitman,et al.  Radiation-Induced Expansion of Semiconductors , 1957 .

[301]  W. Spitzer,et al.  Determination of Optical Constants and Carrier Effective Mass of Semiconductors , 1957 .

[302]  R. Hines Radiation Effect of Positive Ion Bombardment on Glass , 1957 .

[303]  U. Gonser,et al.  Radiation Damage Experiments in III-V-Compounds , 1957 .

[304]  H. Y. Fan,et al.  Infra-red Absorption in Semiconductors , 1956 .

[305]  A. H. Kahn,et al.  Theory of the Infrared Absorption of Carriers in Germanium and Silicon , 1955 .