论文信息 - FORMATION OF SILICON NITRIDE AT A SILICON-SILICON DIOXIDE INTERFACE DURING LOCAL OXIDATION OF SILICON AND DURING HEAT-TREATMENT OF OXIDIZED SILICON IN AMMONIA GAS - 字舞流文

FORMATION OF SILICON NITRIDE AT A SILICON-SILICON DIOXIDE INTERFACE DURING LOCAL OXIDATION OF SILICON AND DURING HEAT-TREATMENT OF OXIDIZED SILICON IN AMMONIA GAS

J. A. Appels | E. Kooi | J. G. van Lierop

[1] J. A. Appels,et al. Formation of Silicon Nitride at a Si ‐ SiO2 Interface during Local Oxidation of Silicon and during Heat‐Treatment of Oxidized Silicon in NH 3 Gas , 1976 .