Within the research network “New Optimization Concepts for High Quality UV-Coatings” European research groups cooperated to optimize optical coatings for applications in the UV/VUV-spectral range. Besides different production processes for UV-coating systems, an extended spectrum of characterization techniques has been investigated and adapted to the special requirements in the UV/VUV-spectral range by the partners. For a detailed study of the properties and their relation to the deposition parameters of UV-coatings, joint experiments were conducted by the consortium combining the research infrastructure of the partners. In the present contribution a review will be given on selected characterization techniques which were developed or adapted to coatings for the UV-range within the network. Results for fluoride coatings will be presented and discussed in respect to the parameters of conventional and ion beam sputtering processes applied for their production. Besides the optical parameters including absorption and scattering, also the structural properties and the surface quality of single layer MgF2 and LaF3-coatings will be summarized.
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