论文信息 - Planar and three-dimensional damage-free etching of β-Ga2O3 using atomic gallium flux - 字舞流文

Planar and three-dimensional damage-free etching of β-Ga2O3 using atomic gallium flux

S. Rajan | M. Brenner | Hongping Zhao | Jinwoo Hwang | Zhanbo Xia | N. K. Kalarickal | Mohammad Wahidur Rahman | A. Fiedler | A. Bhuiyan | Hsien-Lien Huang | Sushovan Dhara | Ashok Dheenan | Taeyoung Kim | Zane Jamal Eddine