Triaxial air bearing table balance method and apparatus thereof

The invention aims to provide a three-axle air bearing table balancing method with simple structure, low cost and convenient operation and a three-axle air bearing table balancing device. The three-axle air bearing table balancing device consists of flywheel systems and weight balance mechanisms; the flywheel systems include two sets which are both installed on the plane of the three-axle air bearing table orthogonally and correspond to two sets of weight balance mechanisms installed on the ball bearing center radial line of the three-axle air bearing table; the weight balance mechanisms include two sets which are both installed on the ball bearing center radial line of the three-axle air bearing table and on the plane of the three-axle air bearing table orthogonally. The three-axle air bearing table is provided with the special weight balance mechanisms and the special flywheel systems, which are capable of controlling the free movement of the table. The control principle of the flywheel is to keep the present gesture unchanged and the balance weight is automatically controlled and moved according to the speed change of the flywheel on the table surface, thus realizing online measurement and adjustment, as well quick and accurate automatic balance. The method and the device have simple structure, convenient operation and low cost.