ZnO Nanobox Luminescent Source Fabricated by Three-Dimensional Nanotemplate Pulsed-Laser Deposition

A novel nanofabrication technique for metal oxide has been developed by combining inclined pulsed laser deposition with a three-dimensional (3D) nanotemplate prepared by nanoimprint lithography. ZnO nanobox structures with a tunable wall width of 20 to 100 nm can be successfully fabricated by controlling their alignment on a large scale. Cathodoluminescence measurements at 300 K showed an intense luminescence peak at around 380 nm corresponding to near-band-edge emission from even a single ZnO nanobox. The architecturally designed 3D ZnO nanostructures with an excellent wide-gap luminescent character should be good candidates for nanoscale device applications as a luminescent source.