Demonstration of scaled (⩾0.12 μm2) Pb(Zr,Ti)O3 capacitors on W plugs with Al interconnect
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Luigi Colombo | Theodore S. Moise | Alvin Leng Sun Loke | Stephen R. Gilbert | Steven M. Bilodeau | Shawming Ma | Scott R. Summerfelt | Jun Amano | G. Xing | T. Hsu | Michael W. Russell | Tomoyuki Sakoda | L. A. Wills | Rahim Kavari | Scott Johnson | D. J. Vestcyk | P. C. van Buskirk
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