论文信息 - Interaction between binary alloy thin films and silicon substrate: the conditions of bilayer formation and the effect of additional component - 字舞流文

Interaction between binary alloy thin films and silicon substrate: the conditions of bilayer formation and the effect of additional component

I. N. Sorokin | V. Pugachevich | D. Gromov | A. Mochalov

[1] Shyam P Murarka,et al. Silicides for VLSI Applications , 1983 .